400° C continuous (for bake only; water flow recommended for actual deposition monitoring)
450°C continuous (for bake only; water flow recommended for actual deposition monitoring)
傳感器頭部尺寸（大外殼）
1.35 in. x 1.38 in. x 1.21 in. high (34 mm x 35 mm x 31 mm high
1.35 in. x 1.38 in. x 0.94 in. high (34 mm x 35 mm x 24 mm high)
晶體交換
Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact. Pneumatically operated shutter flips up for easy crystal exchange.
Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact.
安裝
a) Standard—four #4-40 tapped holes on the back of the body
b) Optional—right angle bracket; IPN 007-108
Four #4-40 tapped holes on the back of the body
饋入件
2¾ in. ConFlat®, integral with sensor head
Water, air and coax tubes are semi-rigid, but easily formed (2.0 in. [50.8 mm] minimum bend radius)
2¾ in. ConFlat, integral with sensor head
Water and coax tubes are semi-rigid, but easily formed. (2.0 in. [50.8 mm] minimum bend radius)
實(shí)用工具
1) Minimum water flow 150-200 cc/min, 30° C max. (Do not allow to freeze.) (Customer should provide means of easily disconnecting the ¼ in. water tubes during bakeout.)
3) Solenoid valve, 750-420-G1, 24 VAC or VDC, or equivalent valve required
Minimum water flow 150-200 cc/min, 30° C max. (Do not allow to freeze.) (Customer should provide means of easily disconnecting the ? in. water tubes during bakeout.)
材料
主體和支架
304 type stainless steel
304 type stainless steel
彈簧
Molybdenum and Inconel X-750
Molybdenum and Inconel X-750
水今年、空氣和同軸管線
0.125 in. (3 mm) O.D. water and air x 0.015 in. (0.4 mm) wall thickness seamless 304 stainless steel; 0.188 in. (5 mm) O.D. coax
其他機(jī)械部件
18-8 or 304 stainless
18-8 or 304 stainless
絕緣體
>99% Al2O3 in vacuum; other high density ceramics used elsewhere
>99% Al2O3 in vacuum; other high density ceramics used elsewhere
