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- 公司名稱 英复蟛糠??担◤V州)真空儀器有限公司
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- 更新時(shí)間 2021/2/3 11:17:14
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當(dāng)前位置:儀器網(wǎng) > 產(chǎn)品中心 > 實(shí)驗(yàn)室常用設(shè)備>其它實(shí)驗(yàn)室常用設(shè)備>鍍膜機(jī)> Crystal 12 傳感器
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功能
規(guī)格
類型 | Crystal 12 Sensor | |
---|---|---|
無水時(shí)的烘烤溫度 | 130°C | |
小水流時(shí)的工作等溫環(huán)境溫度 | 300° C | |
尺寸(大外殼) | 4.0 in. (102 mm) dia. x 3.3 in. (84 mm) high 4.75 in. (121 mm) dia. x 3.46 in. (88 mm) with optional mounting posts installed | |
水管和空氣管長度 | Standard 30 in. (762 mm) | |
晶體交換 | Front-loading | |
安裝 | Six #4-40 tapped holes on the back of the sensor body, six #4-40 tapped holes on outside circumference. Three #6-32 tapped holes with optional mounting kit (IPN 750-670-G1). | |
重量 | 4.92 lb. (2.23 kg) | |
安裝要求 | ||
饋入件 | Qty (1) 2-3/4 in. ConFlat® with one coaxial feedthrough, two pass water, one air, IPN 750-685-G1, or, Qty (1) 750-685-G2, with one coaxial feedthrough three tube with Ultra-Torr compression fittings or, Qty (1) 1 in. bolt with one coaxial feedthrough, two pass water, one air IPN 750-030-G1 | |
安裝 | User to provide mounting structure adequate to support weight of Crystal12 and designed to facilitate removal and replacement with minimal change in exact position. An optional mounting post kit, IPN 750-670-G1, may be purchased for this purpose. | |
空氣和水連接 | User to provide vacuum-tight braze joints or connectors for the water and air tubes. Valve assembly for air, IPN 750-420-G1 (not provided), with a 0.022 in. restrictor orifice installed by the user. (Orifice included with Crystal12 accessory kit.) | |
實(shí)用工具 | Minimum water flow 150-200 cc/min, 30° C max (Do not allow water to freeze). Coolant should not contain chlorides as stress corrosion cracking may occur. Regulated air supply 80-90 PSIG (5.5 bar – 6.2 bar) [550 kPa - 620 kPa] 2 meter maximum length of 1/8 in. tubing between sensor head and the solenoid valve. | |
材料 | ||
板、材料罩品率、機(jī)械部件相貫通、主體和圓盤 | 304 type stainless steel | |
彈簧、電氣觸點(diǎn) | Au plated Be-Cu, Au Plated 302 stainless steel | |
水管和空氣管 | S-304, 0.125 in. (3.2 mm) O.D. x .016 in. (0.4 mm) Wall Thickness x 30 in. Long (762 mm) seamless stainless steel tubing | |
連接器 | Stainless steel | |
絕緣體 | Teflon, Peek® | |
電纜 | Teflon insulated copper plated steel | |
晶體 | 0.550 in. (13.97 mm) diameter | |
1 in. 螺栓和 Ultra-Torr(壓縮接頭)端接: | ||
材料 | 304 stainless steel, Teflon, ceramic, beryllium nickel, VITON® | |
溫度 | Operational environment to 300° C with water cooling or 165° C without | |
安裝 | 1.015 in. ±0.010 in. diameter aperture | |
CF 40 焊接式端接: | ||
材料 | 304 stainless steel, Teflon, ceramic, beryllium nickel | |
溫度 | Operational environment to 450° C with water cooling or 165° C without | |
安裝 | Mates with 2 ? in. ConFlat type flanges with 1.375 in. I.D. min. |
附件
名稱 | 說明 |
---|---|
QCM 傳感器饋入件 |
Crystal 12 Sensor | |
---|---|
零件號 | 明細(xì) |
750-420-G1 | 電磁閥積極影響,24 伏(與帶閘門和多晶體傳感器配合使用) |
耗材
名稱 | 說明 |
---|---|
石英監(jiān)控器晶體 |
備件
Crystal 12 Sensor | |
---|---|
零件號 | 明細(xì) |
750-276-P3 | XTAL12 ACTUATOR COVER PASSIVATED |
750-644-G1 | CAROUSEL HOUSING WELDMENT |
750-658-G1 | Deposition Shield Assembly, Crystal 12 |
750-286-P2 | Pneumatic Actuator,CrystalSix/Crystal 12 |
750-291-P1 | Detent, CrystalSix/Crystal 12 |
750-294-P2 | Stop Ratchet, CrystalSix/Crystal 12 |
750-293-P2 | Ratchet, CrystalSix/Crystal 12 |
750-256-P2 | Extension Spring |
750-252-P2 | DET,SPRING POST |
750-649-G1 | Electrical Connection, Crystal 12 |
750-295-G1 | Pawl/Actuator Stem, Crystal 12 Sensor |
750-258-P2 | DET - Bearing Shaft |
070-0779 | Ball Bearing, CrystalSix |
750-652-G1 | Crystal Carousel, Crystal 12 Sensor |
750-650-P1 | RESISTOR NETWORK APERTURE PLATE |
070-1253 | Dowel Pin, CrystalSix |
750-651-P1 | RESISTOR NETWORK SUPPORT |
750-655-P1 | RESISTOR NETWORK INSULATOR |
750-642-G1 | Resistor Network Grid Weldment |
750-661-P1 | Contact Terminal, Crystal 12 |
750-656-P1 | CRYSTAL INSULATOR |
321-038-P6 | Leaf Spring, Crystal 12 |
750-657-P1 | Leaf Spring, Grounding, Crystal 12 |
750-671-P1 | Torsion Spring, Crystal 12 |
750-626-P1 | Spring, Crystal 12 and Sputtering Sensor |
750-647-P1 | Carousel Spindle Body, Crystal 12 |
070-1268 | Bearing, CrystalSix |
070-1254 | E-RING BOWED #HSTBtruarc |
750-660-P1 | pdcation Screw, 6-32, Crystal 12 |
007-126 | DET-30"STN STL SEAMLESS TUBING |
070-201 | #4 開口緊鎖墊圈 |
084-004 | #4-40 X 0.187 內(nèi)六角頭螺釘 |
070-398 | 5103-12H,EXT CRESCENT RET RING |
070-0867 | B4-10,1/8"SHAFT SPACER .094TH |
070-170 | #2 SPLIT LOCKWASHER SS |
070-177 | #4-40 X 3.12 六角頭螺釘 |
080-038 | SCREW 0-80 x .375 LG PHIL PAN HD SS |
082-032 | Lock Washer, #2, Stainless Steel |
082-045 | #2-56 x 0.187 十字槽螺釘 |
084-054 | 開牙鎖定墊片4號 |
082-022 | Washer, #2, Flat, Stainless Steel |
082-024 | Screw, Socket Head, 2-56 x 0.250 in. |
750-292-P2 | Detent Spacer, CrystalSix/Crystal 12 |
080-013 | 開*片#0 |
080-007-P1 | Flat Washer, Stainless Steel |
080-009-P1 | #0-80 X 0.188 凹頭螺釘 |
084-048 | SCREW 4-40 x .250 LG PHIL FLAT HD SS |
750-665-P1 | Shoulder Screw, 2-56, Torsion Spring |
084-093 | Screw, Socket Head, 4-40 x 1.125 in. |
086-084-P2 | #6-21 x 1/8 固定螺釘 |
086-041 | #6 平墊圈 |
086-038 | #6 開口緊鎖墊圈 |
086-036 | #6-32 x 3/8 凹頭螺釘 |
In-vacuum cables | |
321-039-G12 | 真空電纜自動化方案,15.2 厘米(6 英寸) |
007-252 | 真空電纜,30.5 厘米(12 英寸) |
321-039-G11 | 真空電纜越來越重要,61.0 厘米(24 英寸) |
007-044 | 真空電纜線上線下,78.1 厘米(30.75 英寸) |
007-059 | 真空電纜,91.4 厘米(36 英寸) |
007-061 | 真空電纜醒悟,121.9 厘米(48 英寸)- 需要 ModeLock 控制器 |
321-039-G13 | 真空電纜數據顯示,154.2 厘米(60 英寸)- 需要 ModeLock 控制器 |
321-039-G14 | 真空電纜,182.9 厘米(72 英寸)- 需要 ModeLock 控制器 |
321-039-G15 | 真空電纜也逐步提升,3.5 米(137.8 英寸)- 需要 ModeLock 控制器和4 米 XIU |
321-039-G16 | 真空電纜記得牢,4 米(157.5 英寸)- 需要 ModeLock 控制器和4 米 XIU |
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