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Crystal 12 傳感器

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功能

  • 裝有 12 顆晶體助力各業,可進(jìn)行可靠的自動(dòng)轉(zhuǎn)換,從而大限度延長過程運(yùn)行時(shí)間
  • 易于拆卸的旋轉(zhuǎn)傳送帶允許快速更換所有 12 顆晶體
  • 晶體轉(zhuǎn)換由空氣驅(qū)動(dòng)完成(競爭產(chǎn)品是使用生熱電機(jī))提供有力支撐,因而晶體溫度非常穩(wěn)定
  • 易于拆卸的前沉積罩保護(hù)晶體和旋轉(zhuǎn)傳送帶上不會積存材料應用,從而大限度減少拆卸整個(gè)傳感器以進(jìn)行維護(hù)的必要性
  • 可選安裝后套件允許用戶根據(jù)公制硬件大小自行修改

規(guī)格

類型 Crystal 12 Sensor
無水時(shí)的烘烤溫度 130°C
小水流時(shí)的工作等溫環(huán)境溫度 300° C
尺寸(大外殼) 4.0 in. (102 mm) dia. x 3.3 in. (84 mm) high 4.75 in. (121 mm) dia. x 3.46 in. (88 mm) with optional mounting posts installed
水管和空氣管長度 Standard 30 in. (762 mm)
晶體交換 Front-loading
安裝 Six #4-40 tapped holes on the back of the sensor body, six #4-40 tapped holes on outside circumference. Three #6-32 tapped holes with optional mounting kit (IPN 750-670-G1).
重量 4.92 lb. (2.23 kg)
安裝要求  
饋入件

Qty (1) 2-3/4 in. ConFlat® with one coaxial feedthrough, two pass water, one air, IPN 750-685-G1,

or,

Qty (1) 750-685-G2, with one coaxial feedthrough three tube with Ultra-Torr compression fittings

or,

Qty (1) 1 in. bolt with one coaxial feedthrough, two pass water, one air IPN 750-030-G1

安裝 User to provide mounting structure adequate to support weight of Crystal12 and designed to facilitate removal and replacement with minimal change in exact position. An optional mounting post kit, IPN 750-670-G1, may be purchased for this purpose.
空氣和水連接 User to provide vacuum-tight braze joints or connectors for the water and air tubes. Valve assembly for air, IPN 750-420-G1 (not provided), with a 0.022 in. restrictor orifice installed by the user. (Orifice included with Crystal12 accessory kit.)
實(shí)用工具 Minimum water flow 150-200 cc/min, 30° C max (Do not allow water to freeze). Coolant should not contain chlorides as stress corrosion cracking may occur. Regulated air supply 80-90 PSIG (5.5 bar – 6.2 bar) [550 kPa - 620 kPa] 2 meter maximum length of 1/8 in. tubing between sensor head and the solenoid valve.
材料  
板、材料罩品率、機(jī)械部件相貫通、主體和圓盤 304 type stainless steel
彈簧、電氣觸點(diǎn) Au plated Be-Cu, Au Plated 302 stainless steel
水管和空氣管 S-304, 0.125 in. (3.2 mm) O.D. x .016 in. (0.4 mm) Wall Thickness x 30 in. Long (762 mm) seamless stainless steel tubing
連接器 Stainless steel
絕緣體 Teflon, Peek®
電纜 Teflon insulated copper plated steel
晶體 0.550 in. (13.97 mm) diameter
1 in. 螺栓和 Ultra-Torr(壓縮接頭)端接:  
材料 304 stainless steel, Teflon, ceramic, beryllium nickel, VITON®
溫度 Operational environment to 300° C with water cooling or 165° C without
安裝 1.015 in. ±0.010 in. diameter aperture
CF 40 焊接式端接:  
材料 304 stainless steel, Teflon, ceramic, beryllium nickel
溫度 Operational environment to 450° C with water cooling or 165° C without
安裝 Mates with 2 ? in. ConFlat type flanges with 1.375 in. I.D. min.
Crystal12_OrderChart_2013_web-01.png

附件

名稱 說明
QCM 傳感器饋入件
Crystal 12 Sensor
零件號 明細(xì)
750-420-G1 電磁閥積極影響,24 伏(與帶閘門和多晶體傳感器配合使用)

耗材

名稱 說明
石英監(jiān)控器晶體

備件

Crystal 12 Sensor
零件號 明細(xì)
750-276-P3 XTAL12 ACTUATOR COVER PASSIVATED
750-644-G1 CAROUSEL HOUSING WELDMENT
750-658-G1 Deposition Shield Assembly, Crystal 12
750-286-P2 Pneumatic Actuator,CrystalSix/Crystal 12
750-291-P1 Detent, CrystalSix/Crystal 12
750-294-P2 Stop Ratchet, CrystalSix/Crystal 12
750-293-P2 Ratchet, CrystalSix/Crystal 12
750-256-P2 Extension Spring
750-252-P2 DET,SPRING POST
750-649-G1 Electrical Connection, Crystal 12
750-295-G1 Pawl/Actuator Stem, Crystal 12 Sensor
750-258-P2 DET - Bearing Shaft
070-0779 Ball Bearing, CrystalSix
750-652-G1 Crystal Carousel, Crystal 12 Sensor
750-650-P1 RESISTOR NETWORK APERTURE PLATE
070-1253 Dowel Pin, CrystalSix
750-651-P1 RESISTOR NETWORK SUPPORT
750-655-P1 RESISTOR NETWORK INSULATOR
750-642-G1 Resistor Network Grid Weldment
750-661-P1 Contact Terminal, Crystal 12
750-656-P1 CRYSTAL INSULATOR
321-038-P6 Leaf Spring, Crystal 12
750-657-P1 Leaf Spring, Grounding, Crystal 12
750-671-P1 Torsion Spring, Crystal 12
750-626-P1 Spring, Crystal 12 and Sputtering Sensor
750-647-P1 Carousel Spindle Body, Crystal 12
070-1268 Bearing, CrystalSix
070-1254 E-RING BOWED #HSTBtruarc
750-660-P1 pdcation Screw, 6-32, Crystal 12
007-126 DET-30"STN STL SEAMLESS TUBING
070-201 #4 開口緊鎖墊圈
084-004 #4-40 X 0.187 內(nèi)六角頭螺釘
070-398 5103-12H,EXT CRESCENT RET RING
070-0867 B4-10,1/8"SHAFT SPACER .094TH
070-170 #2 SPLIT LOCKWASHER SS
070-177 #4-40 X 3.12 六角頭螺釘
080-038 SCREW 0-80 x .375 LG PHIL PAN HD SS
082-032 Lock Washer, #2, Stainless Steel
082-045 #2-56 x 0.187 十字槽螺釘
084-054 開牙鎖定墊片4號
082-022 Washer, #2, Flat, Stainless Steel
082-024 Screw, Socket Head, 2-56 x 0.250 in.
750-292-P2 Detent Spacer, CrystalSix/Crystal 12
080-013 開*片#0
080-007-P1 Flat Washer, Stainless Steel
080-009-P1 #0-80 X 0.188 凹頭螺釘
084-048 SCREW 4-40 x .250 LG PHIL FLAT HD SS
750-665-P1 Shoulder Screw, 2-56, Torsion Spring
084-093 Screw, Socket Head, 4-40 x 1.125 in.
086-084-P2 #6-21 x 1/8 固定螺釘
086-041 #6 平墊圈
086-038 #6 開口緊鎖墊圈
086-036 #6-32 x 3/8 凹頭螺釘
In-vacuum cables
321-039-G12 真空電纜自動化方案,15.2 厘米(6 英寸)
007-252 真空電纜,30.5 厘米(12 英寸)
321-039-G11 真空電纜越來越重要,61.0 厘米(24 英寸)
007-044 真空電纜線上線下,78.1 厘米(30.75 英寸)
007-059 真空電纜,91.4 厘米(36 英寸)
007-061 真空電纜醒悟,121.9 厘米(48 英寸)- 需要 ModeLock 控制器
321-039-G13 真空電纜數據顯示,154.2 厘米(60 英寸)- 需要 ModeLock 控制器
321-039-G14 真空電纜,182.9 厘米(72 英寸)- 需要 ModeLock 控制器
321-039-G15 真空電纜也逐步提升,3.5 米(137.8 英寸)- 需要 ModeLock 控制器和4 米 XIU
321-039-G16 真空電纜記得牢,4 米(157.5 英寸)- 需要 ModeLock 控制器和4 米 XIU

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