類(lèi)型 | 1000 ... 500 Torr / mbar | 200 ... 1 Torr / mbar | 0.5 ... 0.1 Torr / mbar |
精度 (1) | % of reading | 0.2 | 0.2 | 0.4 |
溫度效應(yīng) | | | |
零點(diǎn) | percent FS/°C | 0.0025 | 0.0025 | 0.005 |
滿量程 | % of reading / °C | 0.02 | 0.02 | 0.02 |
壓力,大 | kPa (absolute) | 400 | 260 | 130 |
分辨率 | percent FS | 0.003 | 0.003 | 0.003 |
低讀數(shù) | percent FS | 0.01 | 0.01 | 0.01 |
建議的低讀數(shù) | percent FS | 0.05 | 0.05 | 0.05 |
建議的低控制壓力 | percent FS | 0.5 | 0.5 | 0.5 |
溫度 | | | |
運(yùn)行(周?chē)h(huán)境)(5) | °C | +10 … +50 | +10 … +50 | +10 … +50 |
在法蘭處烘烤 | °C | ≤110 | ≤110 | ≤110 |
貯存 | °C | –20 … +65 | –20 … +65 | –20 … +65 |
電源電壓 | | +14 … +30 VDC or±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) |
功耗 | | | |
加熱時(shí) | W | ≤15 | ≤15 | ≤15 |
運(yùn)行溫度 | W | ≤10 | ≤10 | ≤10 |
輸出信號(hào)(模擬) | V (dc) | 0 … +10 | 0 … +10 | 0 … +10 |
反應(yīng)時(shí)間 (2) | ms | 30 | 30 | 130 / 30 (3) |
保護(hù)等級(jí) | | IP 40 | IP 40 | IP 40 |
標(biāo)準(zhǔn) | | | |
CE 合規(guī) | | EN 61000?6?2/-6-3, EN 61010 & RoHS | EN 61000?6?2/-6-3, EN 61010 & RoHS | EN 61000?6?2/-6-3, EN 61010 & RoHS |
ETL 認(rèn)證 | | UL 61010?1, CSA 22.2 No.61010?1 | UL 61010?1, CSA 22.2 No.61010?1 | UL 61010?1, CSA 22.2 No.61010?1 |
SEMI 合規(guī) (5) | | SEMI S2 | SEMI S2 | SEMI S2 |
電氣連接 | | D-sub, 15 pole, male | D-sub, 15 pole, male | D-sub, 15 pole, male |
設(shè)定點(diǎn) | | | |
設(shè)定點(diǎn)數(shù)量 | | 2 (SP1,SP2) | 2 (SP1,SP2) | 2 (SP1,SP2) |
繼電器觸點(diǎn) | | ≤30 | ≤30 | ≤30 |
滯后 | percent FS | 1 | 1 | 1 |
診斷端口 | | | |
協(xié)議 | | RS232-C | RS232-C | RS232-C |
讀數(shù) | | pressure, status, ID | pressure, status, ID | pressure, status, ID |
設(shè)置 | | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset |
暴露于真空的材料 | | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) |
內(nèi)部容積 | | | |
內(nèi)部容積 1/2'' 管 | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
內(nèi)部容積 DN 16 ISO KF | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
內(nèi)部容積 DN 16 CF-R | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
內(nèi)部容積 8 VCR® | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
重量 | | | |
重量 1/2'' 管 | g | 837 | 837 | 837 |
重量 DN 16 ISO KF | g | 852 | 852 | 852 |
重量 DN 16 CF-R | g | 875 | 875 | 875 |
重量 8 VCR® | g | 897 | 897 | 897 |
EtherCAT | | | |
協(xié)議 EtherCAT | | protocol specialized for EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT |
通訊標(biāo)準(zhǔn) | | ETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge | ETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge | ETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge |
節(jié)點(diǎn)地址 | | Explicit Device Identification | Explicit Device Identification | Explicit Device Identification |
物理層 | | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) |
數(shù)字功能讀取 | | pressure, status, ID | pressure, status, ID | pressure, status, ID |
數(shù)字功能設(shè)置 | | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset |
(CoE) | | SDO requests, responses and information | SDO requests, responses and information | SDO requests, responses and information |
過(guò)程數(shù)據(jù) | | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping |
EtherCAT 連接器 | | 2 x RJ45, 8-pin (socket), IN and OUT | 2 x RJ45, 8-pin (socket), IN and OUT | 2 x RJ45, 8-pin (socket), IN and OUT |
電纜 | | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher |
電纜長(zhǎng)度 | m (ft.) | ≤100 (330) | ≤100 (330) | ≤100 (330) |
Signal processing time | ms | 2 | 2 | 2 |
Profinet | | | |
Communication protocol | | protocol specalized for Profinet | protocol specalized for Profinet | protocol specalized for Profinet |
Data rate | | 100 Mbps | 100 Mbps | 100 Mbps |
Physical layer | | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) |
Digital functions read | | pressure, status, ID | pressure, status, ID | pressure, status, ID |
Digital functions set | | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset |
Profinet connector | | 2 x RJ45, 8-pin (socket), input & output | 2 x RJ45, 8-pin (socket), input & output | 2 x RJ45, 8-pin (socket), input & output |
Profinet Cable | | Special Ethernet Patch Cable or Crossover Cable, shielded (CAT5e quality or higher) | Special Ethernet Patch Cable or Crossover Cable, shielded (CAT5e quality or higher) | Special Ethernet Patch Cable or Crossover Cable, shielded (CAT5e quality or higher) |
Cable lenght | | <100 m (330 ft) | <100 m (330 ft) | <100 m (330 ft) |
DeviceNet™ | | | |
協(xié)議 | | DeviceNet™, group 2 slave only | DeviceNet™, group 2 slave only | DeviceNet™, group 2 slave only |
數(shù)據(jù)率 | kBaud | | | |
電纜長(zhǎng)度 125 kbps | m (ft.) | 500 (1650) | 500 (1650) | 500 (1650) |
電纜長(zhǎng)度 250 kbps | m (ft.) | 250 (825) | 250 (825) | 250 (825) |
電纜長(zhǎng)度 500 kbps | m (ft.) | 100 (330) | 100 (330) | 100 (330) |
MAC ID | | address 00 - 63 by switch or network programmable | address 00 - 63 by switch or network programmable | address 00 - 63 by switch or network programmable |
數(shù)字功能讀取 | | pressure, status, ID | pressure, status, ID | pressure, status, ID |
數(shù)字功能設(shè)置 | | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset |
技術(shù)規(guī)格 | | DeviceNet™ "Vacuum Gauge Device Profile" (ODVA) | DeviceNet™ "Vacuum Gauge Device Profile" (ODVA) | DeviceNet™ "Vacuum Gauge Device Profile" (ODVA) |
設(shè)備類(lèi)型 | | ''VG'' vacuum gauge | ''VG'' vacuum gauge | ''VG'' vacuum gauge |
I / O 從屬傳訊 | | polling only | polling only | polling only |
真空計(jì) D 型連接器的電源電壓 | | +14 … +30 VDC or ±15 V / ≤12 W | +14 … +30 VDC or ±15 V / ≤12 W | +14 … +30 VDC or ±15 V / ≤12 W |
為微型連接器上的 DeviceNet 收發(fā)器提供電壓 | | 24 V nom / <2 w="" (11="" …="" 25="">2> | 24 V nom / <2 w="" (11="" …="" 25="">2> | 24 V nom / <2 w="" (11="" …="" 25="">2> |
DeviceNet™ 連接器 | | microstyle, 5 pin, male | microstyle, 5 pin, male | microstyle, 5 pin, male |
CDG(模擬輸出首次、CDG 電源電壓可能性更大、設(shè)定點(diǎn))連接器 | | D-sub, 15 pin, male | D-sub, 15 pin, male | D-sub, 15 pin, male |
Profibus DP | | | |
波特率 | | 9.6 / 19.2 / 93.75 / 187.5 / 500 | 9.6 / 19.2 / 93.75 / 187.5 / 500 | 9.6 / 19.2 / 93.75 / 187.5 / 500 |
地址 | | address 00 - 125 by switch or network programmable | address 00 - 125 by switch or network programmable | address 00 - 125 by switch or network programmable |
數(shù)字功能讀取 | | pressure, status, ID | pressure, status, ID | pressure, status, ID |
數(shù)字功能設(shè)置 | | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset |
Profibus DP 連接器 | | D-sub, 9 pin, female | D-sub, 9 pin, female | D-sub, 9 pin, female |
CDG(模擬輸出、電源電壓搖籃、設(shè)定點(diǎn))連接器 | | D-sub, 15 pin, male | D-sub, 15 pin, male | D-sub, 15 pin, male |